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R&D: Design of Ferroelectric-Metal Field-Effect Transistor for Multi-Level-Cell 3D NAND Flash

Demonstrating that FeMFET-based 3D NAND can operate 512-layer with sufficient sense margin for MLC operation

2023 IEEE International Memory Workshop (IMW) has published an article written by Sola Woo, Gihun Choe, Asif Islam Khan, Suman Datta, and Shimeng Yu, School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA.

Abstract: Ferroelectric-metal field-effect transistor (FeMFET) based three-dimensional NAND architecture (3D NAND) is investigated for multi-level cell (MLC) operation. The FeMFET with a gate-stack of metal-ferroelectric-metal-insulatorsemiconductor (MFMIS) is used for improving memory window to 1.60V and alleviating variability caused by ferroelectric phase variation for MLC operation. In addition, the read-out current is examined by increasing the vertical gate-stack from 256-layer to 512-layer using page buffer circuit for sensing operation. Leveraging TCAD modeling and SPICE simulation, we demonstrate that FeMFET-based 3D NAND can operate 512-layer with sufficient sense margin for MLC operation.

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